Focused Ion Beam (집속 이온빔)
Model: IDIM-FIB, Manufactured in Lab
Specification
- Ion source: gallium
- Acceleration voltage: 1 ~30 kV continuosly
- Probe current: 1 pA ~ 50 nA
- Image resolution: 2.5 nm
- Patterning resolution: < 50 nm
- Number of aperture: 13
- 5-axes eucentric stage: 2.5 nm resolution
- Nano pattern generation system: 6 MHz


AFN printer(Aerodynamically Focused Nanopaticle printer)(공기역학적 나노입자집속 적층시스템)
Model: Manufactured in Lab
Specification
- Deposition nozzle
   · Nozzle exit diameter : ф 100~500 mm
   · Stand off Distance (SoD) : 10 mm~10 mm
- Particle feeder
   · particle feeding control : solenoid valve on/off control (PWM),
     response time < 10 ms
   · Secondary vacuum pump : 100 l/min
   · Carrier gas pressure : 100~400 kPa
- Stage motion control
   · 3 axis stepping motorized stage
   · Position accuracy : 1 mm, maximum speed : 5,000 mm/sec
- in situ Vision system : X 50 optical microscope/CCD camera
- Patterning resolution : 10 mm


FDM 3D printer
- Model: Stratasys F270
- System dimension: 1626 X 864 X 711 mm, 227 kg
- Build size: 305 X 254 X 305 mm
- Material: PLA, ABS, ASA, QSR (support)
- Layer height
0.127 mm - ABS, ASA
0.178 mm - ABS, ASA
0.254 mm - PLA, ABS, AS
0.330 mm - ABS, ASA
- Precision: 0.200 mm or 0.002 mm/mm

- 담당자(정): 김형수(thegame900@snu.ac.kr)
- 담당자(부): 허재경(hjk9408@snu.ac.kr)
- 처음 사용 시 담당자에게 사용법에 대한 교육 필수
- 사용시 캘린더 등록 필수 (캘린더 미등록 발각시 임의로 제작 취소 가능)
- 제작 시간 5시간 이상의 경우 18:00시 이후 또는 주말 사용 권장
- 재료 부족 시 담당자에게 미리 통보





Fiber reinforced composite 3D printer (섬유 강화 복합재 3D 프린터)
Model: Fiber reinforced composite 3D printer
Specification
- Printing Technology : Fused Filament Fabrication (FFF), Continuous Filament Fabrication (CFF)
- Build Size (X, Y, Z) : 320mm x 132mm x 154mm
- Material Compatibility : Carbon Fiber, Kevlar®, Fiberglass, Nylon
- Highest Layer Resolution : 100 Microns (FFF)
- Extruders / Nozzles : Dual / Quick Change



SLA 3D Printer
Model: Nobel 1.0A
Specification
- Maximum size: 128 x 128 x 200 mm
- Resolution: 0.025mm / 0.05mm / 0.1mm
- Material: Photosensitive resin
- Software: XYZware_Nobel




Sindoricoh dp200 3D Printer
Model: sindoricoh DP200
Specification
- Maximum size: 210 X 200 X 195 mm
- Resolution: 0.05 ~ 0.4 mm
- Material: ABS, PLA
- Software: 전용 슬라이싱 SW
- File: stl, ply, obj, G-Code(RepRap)




IDIM-Laser(IDIM-레이져)
Model: UV 355nm Galvano Scanner(삼우과학), UV Pulsed AWAVE laser(LVI Technologies Inc)
Specification
- Wavelength: UV 355 nm
- Output power: >3W at 30 kHz
- Pulse width: 15 ns~20 ns at 30kHz
- Pulse energy: >100uJ at 20kHz
- Operating frequency: Single to 300 kHz
- Beam quality: TEM00, M2:<1.2
- Polarization: Horizontal 100:1
- Operation Temp(max): 30℃
- Control function: INT triggering, EXT triggering, Gate, Syn.Out, remote shutter, interlock
- eDrive ED2U Series Driver
- Galvano Scanner
- UV 355 nm attenuator
- 355 nm beam expander X2 to X10
- 45 deg reflector
- Beam splitter
- Chamber size: 1200*1200*1200


E-BEAM EVAPORATION SYSTEM
Model: Specification
- Substrate holder : 4’’ Silicon wafer, <800℃ Suitable.
- Spindle speed: 0 ~ 24,000rpm
- Substrate heater : IR lamp heating, PID control (resolution : ±3℃)
- -E-Beam source : 0 ~ 5kV, Input power 5kV/ 220V
- Thermal source : 0 ~ 3kW, 1 Boat slot (1set, 2cc)
- Shutter control 1set
- Vacuum pump : 1000L/sec turbo molecular pump, Purge gas heater kit, 600L/min, 10-4 torr Rotary pump





5-axis CNCr
Model: CE6405E-5X
- Workable area: 540 X 380 X 120 mm (3axis) 60 X 60 X 40 mm (5axis)
- Max. spindle RPM: 24000 rpm
- Consistent accuracy: 0.01 mm
- Repeatability: 0.01 mm
- CAM: 시마트론
- 담당자: 허재경(hjk9408@snu.ac.kr), 장기환(jkh162332@snu.ac.kr)



IDIM-Large area NPDS (nano-particle deposition system-대면적 나노 입자 적층 시스템)
Model: Manufactured in Lab
Specification
- Chamber
·Dimension: Φ1600 * 2620L * 2000H (mm x mm x mm)
·Inner space: Φ1,400 x 1,840L (mm x mm)
·View Port: 6” (View Dia.) O-ring type (4 ea)
·Weight: 1,600 kg
- Rotary Pump: MVP144 ? 2,400 L/min
- Stage SPEC
·Stroke: X (1,050 mm), Y (1,050 mm), Z (50 mm)
·Motor: Step motor
·Accuracy: 50 μm
·Speed: 0.1 mm/s ~ 200 mm/s
·Work weight: ≤ 10 kg (Nozzle)
- Substrate dimension: ≤ 1050 x 1050 x 5t (mm x mm x mm)
- Solid particle Dispensor : RPG 1000
- Compressor & Cleaning system : PA-BACT3


Ion Coater
Model: SPT-20 Specification
- SPT-20
- Dimension : 420x220x230mm
- Power : 220V/60HZ, 400W
- Time : 0~900sec(1step-10sec)
Rotary pump
- Power : 50L/min
- Range : about 0.1 torr



Spin Coater
Model: ACE-200 . Wafer size : 0.2~4 inch diameter
. Bowl size : 235m/m
. Bowl material : SUS or P.P or Teflon
. Step : 100
. Dimension ( W x D x H ) : 320 x 420 x 240 mm
. Rotation Speed : 0 to 50 ~ 8,000 rpm
. Hold Time : 1~999sec
. Power Input : AC 220V, 50/60 Hz
. Accuracy : +- 1 R.P.M
. Acceleration, deceleration free : 3000 R.P.M/sec
. Vaccuum Input : -450~ -650mmHg ( 6mm ID/ 8mm OD )
. Display : LCD ( back light )
. System Controller : Micom control
. Graphic Function : Real time for steps Graphic representation



Desk CNC router
Model: QL-3636
Specification
- Work area (X/Y/Z): 360 x 360 x 200 mm
- Spindle speed: 0 ~ 24,000rpm
- Linear stages: 0.5~250 mm/s, Stepping motor, Ball screw and LM guide
- Controller: NC studio (PC, RS-232)
- Resolution : 0.001mm
- Precision : +-0.05mm/300mm
- Iterative precision : +-0.03mm



Plasma & Rotary Plasma
- APC1000S (jesagi HANKOOK)
- PL-ROTARY NOZZLE (플라즈마라이프)














Hybrid Laser Polishing Machine
- SW80-1213-SK10 (SAMWOO hitech, Korea)
Speed : Max 12,000 rpm
Run-out: Max 1 μm
Tool interface: SK10
Torque: 1.1 Nm
Power: 1.3 kW
- Motion Stage (Justek):
XY axis : LM guide, 700x500 mm, Max 3m/sec, 1um Resolution (encoder)
Z axis : Stepper motor with Ball-screw, Max 150 mm stroke
Controller: Turbo PMAC Clipper (Delta tau)
Force sensor (embedded) Model: 9251A (Kistler, Switzerland)
Force range: ±5 kN
Sensitivity: -4 pC/N
Resolution: 1 μN




Mini-NPDS (Nano Particle Deposition System)(나노 입자 적층 시스템)
Model: Manufactured in Lab
Specification
- Chamber size: 300 x 300 x 350(mm)
- Outlet pressure: 0.3 Mpa
- SoD range: 3~7(mm)
- Operating condition: Vacuum (-0.095MPa) / atmosphere
- Stage: MMT (X-Y-Z 20 x 20 x 20)(3-D)
- Controller: WSDK
- Vacuum pump: capacity 1000L/min



Mini lathe (ML-210)
- 센터의 높이 : 52mm
- 센터간의 거리 : 210mm
- 왕복대상의 회전직경 : Ø58mm
- 베드상의 회전직경 : Ø104mm
- 주축 관통 직경 : Ø10.5mm
- 주축의 회전수 : 280 ~ 3100rpm, O-Ring 6단변속
- 심압축 이동량 : 30mm
- 심압축 외경 : Ø18mm
- 왕복대 전후이동량 : 60mm
- 왕복대 좌우이동량 : 210mm(베드전역)

Drilling Machine (드릴링 머신)
- 위치 : 301동 1255호
- 모델 : YSTM-19
- 테이블 치수 : 직경 305 (mm)
- 높이 : 1200 (mm)
- 모터 : 삼상 0.4~6p (kW)
- 드릴 능력 : 19 (mm)
- 탭 능력 : 14 (mm)




Hand Knitting Machines
- Model: Brother Hand Knitting Machines KH 831
- Specification : Max 200 needles





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