Focused Ion Beam (집속 이온빔)
Model: IDIM-FIB, Manufactured in Lab
Specification
- Ion source: gallium
- Acceleration voltage: 1 ~30 kV continuosly
- Probe current: 1 pA ~ 50 nA
- Image resolution: 2.5 nm
- Patterning resolution: < 50 nm
- Number of aperture: 13
- 5-axes eucentric stage: 2.5 nm resolution
- Nano pattern generation system: 6 MHz


AFN printer(Aerodynamically Focused Nanopaticle printer)(공기역학적 나노입자집속 적층시스템)
Model: Manufactured in Lab
Specification
- Deposition nozzle
   · Nozzle exit diameter : ф 100~500 mm
   · Stand off Distance (SoD) : 10 mm~10 mm
- Particle feeder
   · particle feeding control : solenoid valve on/off control (PWM),
     response time < 10 ms
   · Secondary vacuum pump : 100 l/min
   · Carrier gas pressure : 100~400 kPa
- Stage motion control
   · 3 axis stepping motorized stage
   · Position accuracy : 1 mm, maximum speed : 5,000 mm/sec
- in situ Vision system : X 50 optical microscope/CCD camera
- Patterning resolution : 10 mm


Fiber reinforced composite 3D printer (섬유 강화 복합재 3D 프린터)
Model: Fiber reinforced composite 3D printer
Specification
- Printing Technology : Fused Filament Fabrication (FFF), Continuous Filament Fabrication (CFF)
- Build Size (X, Y, Z) : 320mm x 132mm x 154mm
- Material Compatibility : Carbon Fiber, Kevlar®, Fiberglass, Nylon
- Highest Layer Resolution : 100 Microns (FFF)
- Extruders / Nozzles : Dual / Quick Change


SLA 3D Printer
Model: Nobel 1.0A
Specification
- Maximum size: 128 x 128 x 200 mm
- Resolution: 0.025mm / 0.05mm / 0.1mm
- Material: Photosensitive resin
- Software: XYZware_Nobel



Fused Deposition Modeling Machine (쾌속 조형기)
- Maximum size: 203 x 203 x 305 mm (8 x 8 x 12 inches)
- Layer Thickness: 0.245 mm (0.010 in.)
- Resolution: 0.45mm
- Material: ABS (and support material)









IDIM-Laser(IDIM-레이져)
Model: UV 355nm Galvano Scanner(삼우과학), UV Pulsed AWAVE laser(LVI Technologies Inc)
Specification
- Wavelength: UV 355 nm
- Output power: >3W at 30 kHz
- Pulse width: 15 ns~20 ns at 30kHz
- Pulse energy: >100uJ at 20kHz
- Operating frequency: Single to 300 kHz
- Beam quality: TEM00, M2:<1.2
- Polarization: Horizontal 100:1
- Operation Temp(max): 30℃
- Control function: INT triggering, EXT triggering, Gate, Syn.Out, remote shutter, interlock
- eDrive ED2U Series Driver
- Galvano Scanner
- UV 355 nm attenuator
- 355 nm beam expander X2 to X10
- 45 deg reflector
- Beam splitter
- Chamber size: 1200*1200*1200


E-BEAM EVAPORATION SYSTEM
Model: Specification
- Substrate holder : 4’’ Silicon wafer, <800℃ Suitable.
- Spindle speed: 0 ~ 24,000rpm
- Substrate heater : IR lamp heating, PID control (resolution : ±3℃)
- -E-Beam source : 0 ~ 5kV, Input power 5kV/ 220V
- Thermal source : 0 ~ 3kW, 1 Boat slot (1set, 2cc)
- Shutter control 1set
- Vacuum pump : 1000L/sec turbo molecular pump, Purge gas heater kit, 600L/min, 10-4 torr Rotary pump





Ion Coater
Model: SPT-20 Specification
- SPT-20
- Dimension : 420x220x230mm
- Power : 220V/60HZ, 400W
- Time : 0~900sec(1step-10sec)
Rotary pump
- Power : 50L/min
- Range : about 0.1 torr





Desk CNC router
Model: QL-3636
Specification
- Work area (X/Y/Z): 360 x 360 x 200 mm
- Spindle speed: 0 ~ 24,000rpm
- Linear stages: 0.5~250 mm/s, Stepping motor, Ball screw and LM guide
- Controller: NC studio (PC, RS-232)
- Resolution : 0.001mm
- Precision : +-0.05mm/300mm
- Iterative precision : +-0.03mm





Nano Particle Deposition System (나노 입자 적층 시스템)
- X-Y stage: 125 x 125 mm
- Vacuum chamber: inner dimension 500 x 500 x 500 mm, 1 X 10-3 torr
- Vacuum pump: capacity 100 l/min
- Substrate holder: 150 X 150 mm
- Z-axis stage: Manual 150 mm Stroke, Max 90 degree tilting















IDIM-Inkjet Printer (잉크젯 프린터)
Model: Microdrop MD-K-130
Specification
- Allowable viscosity for source: 0.4~20 mPas
- Test liquid :[ water, 25℃,60V ]
·Drop diameter : 65 um
·Drop Speed : 1.5 m/s
·Drop rate maximal : 650 us
- Stage motion control
·3 axis stepping motorized stage
·Position accuracy : 1 mm, maximum speed : 5,000 mm/sec
- in situ Vision system : X 200 optical microscope/CCD camera


IDIM-Large area NPDS (nano-particle deposition system-대면적 나노 입자 적층 시스템)
Model: Manufactured in Lab
Specification
- Chamber
·Dimension: Φ1600 * 2620L * 2000H (mm x mm x mm)
·Inner space: Φ1,400 x 1,840L (mm x mm)
·View Port: 6” (View Dia.) O-ring type (4 ea)
·Weight: 1,600 kg
- Rotary Pump: MVP144 ? 2,400 L/min
- Stage SPEC
·Stroke: X (1,050 mm), Y (1,050 mm), Z (50 mm)
·Motor: Step motor
·Accuracy: 50 μm
·Speed: 0.1 mm/s ~ 200 mm/s
·Work weight: ≤ 10 kg (Nozzle)
- Substrate dimension: ≤ 1050 x 1050 x 5t (mm x mm x mm)


3 Axis Polishing Machine
- Spindle model: SW80-1213-SK10 (SAMWOO hitech, Korea)
Speed : Max 12,000 rpm
Run-out: Max 1 μm
Tool interface: SK10
Torque: 1.1 Nm
Power: 1.3 kW
- Motion Stage (Justek):
XY axis : LM guide, 700x500 mm, Max 3m/sec, 1um Resolution (encoder)
Z axis : Stepper motor with Ball-screw, Max 150 mm stroke
Controller: Turbo PMAC Clipper (Delta tau)




High Speed Drilling (Spindle)
- Spindle model: D1733 (Westwind, England)
Speed range: 30,000 ~ 250,000 rpm
Run-out: Max 5um at 250,000 rpm
Tool interface: standard collet 0.125" shank diameter tooling






Mini-NPDS (Nano Particle Deposition System)(나노 입자 적층 시스템)
Model: Manufactured in Lab
Specification
- Chamber size: 300 x 300 x 350(mm)
- Outlet pressure: 0.3 Mpa
- SoD range: 3~7(mm)
- Operating condition: Vacuum (-0.095MPa) / atmosphere
- Stage: MMT (X-Y-Z 20 x 20 x 20)(3-D)
- Controller: WSDK
- Vacuum pump: capacity 1000L/min




CO2 Laser Cutter/Marker
- Manufacturer : LVI tech
- Model : LVI-C10
- Wavelength : 10.6μm
- Laser type : RF excited sealed CO2 laser
- Output power : 10W at TEM00
- Beam quality (m2) : Less than 1.2
- Laser head dimension : 60mm×19mm×19mm
- Beam expender : ×3 ~ ×4
- Power supply : DC 28V
- Interface board : RTC-3, PCI-1730 digital I/O card

Mini lathe (ML-210)
- 센터의 높이 : 52mm
- 센터간의 거리 : 210mm
- 왕복대상의 회전직경 : Ø58mm
- 베드상의 회전직경 : Ø104mm
- 주축 관통 직경 : Ø10.5mm
- 주축의 회전수 : 280 ~ 3100rpm, O-Ring 6단변속
- 심압축 이동량 : 30mm
- 심압축 외경 : Ø18mm
- 왕복대 전후이동량 : 60mm
- 왕복대 좌우이동량 : 210mm(베드전역)

Injection Molding Machine: Model G-100T
- 6 cu. in. (4 oz.) Max.
- Single shot 20 ton max.
- Clamping force (toggle).
- 12,000 psi max. Injection pressure








Nano Composite Deposition System (나노 복합재 적층 시스템)
- Resolutions of each axis: 1μm
- Stroke: x-axis 150mm | y-axis 100mm | z-axis 70mm
- Spindle speed: Max 46,000rpm
- H/W system: Packer stage
- S/W: PMAC controller
- Hybrid process: Deposition and machining








Model 3400A Fluidized Bed Aerosol Generator
- Output Concentration Range: 10 to 100 mg/m3
- Carrier Gas Flowrate Range: 5 to 15 liters/min at 345 KPa (50 psi)
- Particle Size Range: Maximum 40-μm aerodynamic diameter (particles smaller than 0.5 μm do not deagglomerate efficiently.)
- Cyclone: Stainless steel, 0.5 in. diameter
- Dimensions: 264 × 368 × 150 mm (LWH)




Kira Solid Center
- Type: PLT-A4
- Model Material: Exclusive use sheet paper
- Model Size: 280×190 ×200m
- Paper Thickness: 0.08mm, 0.15mm
- Resolution: ±0.05mm (X, Y), ±0.1mm (Z)
- Accuracy: ±0.2mm
- File Formats: STL, RPF, RPS, JAMA-IGES
- Throughput: 1sheet/40sec. (Typ.)
- Power Supply: AC 100V±10V(50/60Hz±1Hz)
- Environment: Temperature - 10~30℃   Humidity - 35~60%
- Weight: Approx. 450Kg



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