: : Research BBS : :
Piezoelectric Cantilever의 열 변형 해석
Thermal Analysis of Piezoelectric Cantilever
RESEARCHERS Suk-Yong Jeong, Sung-Geun Kim, Sung-Hoon Ahn PERIOD 2005. 1. ~ 2006. 12.
SPONSOR LG전자 (LG Electronics)

- To find TTC (Thermal Time Constant) and the temperature of tip
- To compare between experimental and analysis model of silicon cantilever
- To find the optimum geometry of cantilever and tip

Geometry of silicon nitride cantilever

Transient thermal analysis of silicon nitride cantilever

Comparison with experimental data about silicon cantilever

Trend of TTC for optimal design

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