: : Research BBS : :
나노 입자 적층 시스템
Nano Particle Deposition System
RESEARCHERS Doo-Man Chun, MIn-Hyeng Kim, Jae-Chul Lee, Sung-Hoon Ahn
PERIOD 2005. 9. 1. ~ 20010. 2. 28.
SPONSOR 한국과학재단 (Korea Science and Engineering Foundation)


OBJECTIVES
- Development of Metal and ceramic deposition process by spraying nano or micro-sized particles at low temperature and low vacuum condition
- No thermal damage for polymer substrates
- Metal and ceramic deposition in one process
- Simple deposition process without post-processes

System configuration




Deposition result with TiO2 particles and SUS substrate
- Particle : TiO2, Particle size : < 5㎛, Substrate : SUS
- Experiment conditions : d (distance of nozzle and substrate) = 10mm, Q = 25l/min, Nozzle size = 0.5mm dia.


Deposition results with various sizes of nozzle for patterning
- Particle : Mn-Zn ferrite, Particle size : < 5㎛, Substrate : Al 6061
- Experiment conditions : d (distance of nozzle and substrate) = 10mm, Q (flow rate) = 10~15l/min


SEM and EDS result
- Particle : Mn-Zn ferrite, Particle size : < 5㎛, Substrate : Al 6061
- Experiment conditions : d (distance of nozzle and substrate) = 10mm, Q = 15l/min, Nozzle size = 0.91mm dia.


TiO2 coatings on AISI304, Al, Cu, PMMA, PET




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