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백터 스캔을 이용한 가공형상 맞춤형 집속이온빔 가공 최적화
Shape-optimized focused ion beam fabrication using vector scan method
RESEARCHERS Chung-Soo Kim, Hyung-Jung Kim, Dong-Hyun Kim, Sung-Hoon Ahn
PERIOD 2009. 5. 1. ~ 2012. 2. 28.
SPONSOR SNUT (Seoul National University of Technology),
한국과학재단 (The Ministry of Education, Science and Technology, Grant. No. 2009-0081391)

- Define the ion beam processing and analysis parameter using in situ monitoring system developed
- Evaluation of maximum resolution of focused ion beam
- Optimization of ion beam path generation
- Shape-optimized full 3D fabrication method
- Development of integrated S/W ([analysis and evaluation] + [process planning + prediction])

A research schematic of shape-optimized focused ion beam fabrication using vector scan

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